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简要分析了朗谬尔（Ｌａｎｇｍｕｉｒ）探针用于真空电弧镀膜（ＶＡＣ）等离子体诊断的可行性及理论适用性问题．介绍了一种可用于ＶＡＣ等离子体在线监测的探针诊断系统，并利用此系统分析了不同工艺参数下等离子体参数的变化．
The feasibility and theoretical applicability of Langmuir probe for plasma arc diagnosis of vacuum arc coating (VAC) were briefly analyzed. A probe diagnostic system for on-line monitoring of VAC plasma is introduced. The system is used to analyze the change of plasma parameters under different process parameters.