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以液态聚二甲基硅氧烷(PDMS)为前驱体,采用CO_2激光扫描PDMS膜制备硅氧碳(SiOC)陶瓷涂层。通过扫描电子显微镜、热重-差示扫描量热法、红外光谱、X射线衍射和X射线光电子能谱分析了激光裂解PDMS产物的组成与结构。结果表明:激光裂解PDMS可在非平衡状态下快速制备出由晶态Si C、非晶态SiO_2和少量硅有机物组成的陶瓷涂层。激光功率对所制备陶瓷涂层的组成和结构有明显影响。随着激光功率的逐渐增加,陶瓷涂层中有机物含量呈下降趋势,但对晶态Si C的形成产生不利的影响。
A liquid silicon polydimethylsiloxane (PDMS) was used as a precursor to prepare a silicon oxycarbide (SiOC) ceramic coating by CO_2 laser scanning PDMS. The composition and structure of PDMS were analyzed by scanning electron microscopy, thermogravimetry-differential scanning calorimetry, infrared spectroscopy, X-ray diffraction and X-ray photoelectron spectroscopy. The results show that laser pyrolysis of PDMS can rapidly prepare a ceramic coating composed of crystalline Si C, amorphous SiO 2 and a small amount of silicon organic under unbalanced conditions. The laser power has a significant effect on the composition and structure of the prepared ceramic coating. With the gradual increase of laser power, the content of organic matter in the ceramic coating shows a downward trend, but it has an adverse effect on the formation of crystalline SiC.