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采用宏/微结合双驱动进给系统能使系统在大行程范围内具有较高的定位精度。本文设计的宏/微结合双驱动进给系统,由交流伺服电机驱动滚珠丝杠作为宏动机构,压电陶瓷驱动柔性铰链工作台作为微动机构。分别对宏动机构和微动机构进行了数学建模。采用双伺服环控制策略,由宏动机构跟踪输入信号,由精密光栅尺检测宏动机构的实际位移进行反馈构成内伺服环;微动机构将宏动机构的跟踪误差作为输入信号,实时进行补偿,构成外伺服环,实现了宏/微结合双驱动进给系统的连续跟踪控制。最后进行了仿真研究,仿真结果表明跟踪幅值为1mm频率为0.4Hz的正弦曲线,采用宏/微结合双驱动进给系统比只采用宏动机构跟踪误差由±1.6μm减小到了±6nm。
The use of macro / micro combined with dual-drive feed system enables the system to have a high positioning accuracy over a wide range of travel. In this paper, the design of macro / micro combined dual drive feed system, driven by the AC servo motor ball screw as a macro actuator, piezoelectric ceramic drive flexible hinge table as a micro-movement mechanism. The macro motion mechanism and the micro motion mechanism are respectively mathematically modeled. A double servo loop control strategy is adopted. The input signal is tracked by the macro motion mechanism, and the inner servo loop is formed by detecting the actual displacement of the macro motion mechanism by a precision grating scale. The micro motion mechanism compensates the tracking error of the macro motion mechanism as an input signal in real time , Constitute the outer servo loop, to achieve a macro / micro dual-feed system for continuous tracking control. Finally, the simulation study is carried out. The simulation results show that the tracking amplitude is 1mm sinusoidal with a frequency of 0.4Hz. The tracking error is reduced from ± 1.6μm to ± 6nm using the macro / micro dual-driven feed system compared with the macro-actuator only.