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1975年以来在分析电镜中广泛使用比例因子(Cliff-Lorimer因子)法进行薄试样X射线能谱定量分析,但迄今为止实验测定的K—K系比例因子仅二十几个,K—L系比例因子仅10个。70年代末以来利用X射线物理公式,计算了比例因子,在商品仪器上发展了无标样定量分析。但所使用的K—L或L—M系的误差常达20—50％。我们认为这样大的误差来源于电离截面Q。为进一步通过实验I(M)/I(L)比值确定对于M—L合适的Q公式。我们在分析透射电子显微镜镜上用EDAX9100测量纯元素H_0和纯稀土元素Yb、Er、Dy、Gd、Sm等的实验I(M)/I (L)强度比位。本文测重的实验值是在入射电压75、100、150、175、200kV下,样品倾角为0°,X射线出射角为68°进行测量的。为提高信噪比,除了采
Since1975, the scale factor (Cliff-Lorimer factor) method has been widely used in analytical electron microscopy for the quantitative analysis of X-ray energy spectrum of thin samples. However, the K-K scale factor experimentally determined to date has only a few dozen, K-L The scale factor is only 10. Since the late 1970s, X-ray physics has been used to calculate the scaling factor and a standard sample-free quantitative analysis has been developed on commodity instruments. However, the error of the K-L or L-M system is often 20-50%. We think such a big error comes from the ionization cross section Q. To further determine the appropriate Q-formula for M-L by the experimental I (M) / I (L) ratio. We measured the experimental I (M) / I (L) intensity ratio of pure element H_0 and pure rare earth elements Yb, Er, Dy, Gd, Sm, etc. by means of EDAX9100 on a transmission electron microscope. The experimental results of this paper are measured at the incident voltage of 75, 100, 150, 175, 200 kV, the sample inclination of 0 ° and the X-ray emission angle of 68 °. In order to improve the signal to noise ratio, except mining