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基于激光受激辐射损耗原理的远场光学超分辨成像技术,当圆形入射高斯激光经过涡旋相位板调制后,将转变为中心光强为零的圆环形光束,该形状的激光束与光敏聚合物作用,能够制备出具有一定功能的纳米结构。介绍了自主搭建的基于圆环连续激光光源的激光直写系统,以及利用该系统研制的复合纳米结构。当光源为532nm连续激光输出时,与正性光刻胶作用,得到直径<50nm的纳米柱复合结构,以及整齐均匀的纳米柱阵列结构;与负性光刻胶作用,得到直径<100nm的纳米通道,以及整齐均匀的中央有纳米通道的微米柱复合结构阵列。当光源为405nm连续光纤激光时,与正性光刻胶作用,也得到了直径小至153nm的纳米柱复合结构及其阵列。这些纳米结构的基本单元尺寸都突破了光学“阿贝衍射极限”的限制,具有实用潜力。
Based on far-field optical super-resolution imaging technology based on the principle of laser-induced radiation loss, a circularly incident Gaussian laser is transformed into a ring-shaped beam whose central intensity is zero after being modulated by a vortex phase plate. The shape of the beam Photopolymer effect, can have a certain function of nanostructures. The laser direct writing system based on circular continuous laser source and the composite nanostructure developed by the system are introduced. When the light source is 532nm continuous laser output, with the positive photoresist to get a diameter of <50nm nanorods composite structure, and uniform array of nano-column array; and the role of negative photoresist to obtain a diameter of <100nm nano Channel, as well as a uniform array of nano-channel nano-column composite structure. When the light source is 405nm continuous fiber laser, with the role of positive photoresist, the nano-column composite structure with diameter as small as 153nm and its array are also obtained. The basic cell sizes of these nanostructures all break through the limitations of the optical “Abbe diffraction limit” and have practical potential.