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介绍了大功率半导体器件生产线的酸雾净化系统设计,该系统可靠性高,结构合理,实现了对酸碱废气的净化处理,为类似工程的设计提供了参考。
The design of acid mist purification system of high power semiconductor device production line is introduced. The system has high reliability and reasonable structure, and realizes the purification of acid - base waste gas, which provides a reference for the design of similar projects.