论文部分内容阅读
《微电子工艺学》是面向电子科学与技术专业本科生所开设的一门专业选修课,是电子专业培养方案中的重要课程之一。通过本课程的学习,了解和掌握半导体材料制备技术、微电子器件与集成电路制造工艺原理与技术,为微电子器件和集成电路的设计和制造奠定基础。掌握制造集成电路所涉及的材料、外延、氧化、掺杂、微细图形加工等的原理与技术,熟悉双极型和MOS集成电路的制造工艺流程,了解集成电路的新工艺和新技术。而
Microelectronics Technology is a specialized elective course for undergraduates majoring in electronic science and technology. It is one of the important courses in electronic professional training programs. Through the study of this course, we know and master the principle and technology of semiconductor material preparation technology, microelectronic devices and integrated circuit manufacturing technology, and lay the foundation for the design and manufacture of microelectronic devices and integrated circuits. Master the principles and technologies of material, epitaxy, oxidation, doping, micro-patterning, etc., involved in the manufacturing of integrated circuits, become familiar with the manufacturing process of bipolar and MOS integrated circuits, and understand the new processes and technologies of integrated circuits. and