Capacitance of High-Voltage Coaxial Cable in Plasma Immersion Ion Implantation

来源 :Journal of Materials Science & Technology | 被引量 : 0次 | 上传用户:jonsh123
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
Plasma immersion ion implantation (PIII) is an excellent technique for the surf see modification of complex-shaped components. Owing to pulsed operation mode of the high voltage and large slew rate, the capacitance on the high-voltage coaxial cable can be detrimental to the process and cannot be ignored. In fact, a significant portion of the rise-time/fall-time of the implantation voltage pulse and big initial current can be attributed to the coaxial cable. Plasma immersion ion implantation (PIII) is an excellent technique for the surf see modification of complex-shaped components. Owing to pulsed operation mode of the high voltage and large slew rate, the capacitance on the high-voltage coaxial cable can be detrimental to the process and can not be ignored. In fact, a significant portion of the rise-time / fall-time of the implantation voltage pulse and big initial current can be attributed to the coaxial cable.
其他文献
Zirconium monohydride bonded to the framework oxygen of MCM-41 surface was prepared by the reaction of tetraneopentyl zirconium with MCM-41 surface hydroxyl gro
The title compound Na5H37P6Mo18O90 1 (Mr=1658) was synthesized under hydrothermal condition and its crystal structure was determined by X-ray diffraction. It cr
针对农药商品名称的批准、生产中使用、流通中使用的最终期限,农业部农药检定所的王运浩所长特别解释说:第一是从2008年1月8日开始不再受理新的农药商品名的申请;第二是对于
The elevated temperature mechanical properties of TiCp,/W composites produced using powder metallurgical technique were investigated. Results show that with inc
A new phytoecdysteroid was isolated from the root of Rhaponticum uniflorum. Its structure has been shown to be 2, 3, 20, 22-diacetonide ajugasterone. A new phy
本刊讯近日,农业部陆续派出10个宣讲团分赴20多个省(区、市)宣传、贯彻《农药标签和说明书管理办 Recently, the Ministry of Agriculture sent 10 preaching missions to m
继字辈名丑朱继勇先生,十八岁开始进了昆剧这个门。其实,苏州那时只有民锋苏剧团,但是苏昆兼演,以苏养昆。记得那是1954年5月1日中午,朱继勇一个人去苏剧团报到。报到前,小继
Carbon whiskers with new structure and morphology were observed when heating the milled graphite. Transmission electron microscopy (TEM) and high resolution ele
序号申请单位仪器名称及型号1北京瑞利分析仪器公司AF 61 0A原子荧光光谱仪2北京华夏科创仪器技术有限公司 42 0红外分光测油仪3北京市中科机电设备公司Nspm 680 0型扫描探针显微镜4
在深化物资体制改革进程中,中国汽车贸易总公司今年3月7日在北京召开的全国汽车贸易公司经理会议上宣布成立。应邀参加会议的有各大区汽车贸易中心,各省、市、自治区及计划