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采用由金属蒸汽真空弧离子源 ( MEVVA)引出的强束流脉冲钨离子对 H13钢进行了离子注入表面改性研究。注入剂量为 3× 10 1 7cm- 2 ,引出电压为 4 8k V ,平均束流为 15μA· cm- 2 。利用卢瑟福背散射谱( RBS)测量了注入表面的成分 ,借助 X射线衍射仪 ( XRD)和 X射线光电子能谱仪 ( XPS)考察了注入表面的氧化情况及微观结构。研究发现 ,钨离子注入 H 13钢能减轻其表面铁元素的氧化 ;钨元素在其表面的原子百分比可达 2 8%左右 ,并根据能带论确定了注入样品中钨和铁元素的电子结构
H13 steels were ion-implanted surface-modified by pulsed-pulsed tungsten ions derived from a metal vapor vacuum arc ion source (MEVVA). The injection dose was 3 × 10 17 cm -2, the extraction voltage was 48 kV and the average beam current was 15 μA · cm -2. The composition of the implanted surface was measured by Rutherford backscattering spectroscopy (RBS). The oxidation and microstructure of the implanted surface were investigated by X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). It was found that the tungsten ions implanted into H 13 steel can reduce the oxidation of iron on the surface of the steel. The atomic percentage of tungsten on the surface can reach about 2 8%. The electronic structure of tungsten and iron