论文部分内容阅读
本文叙述了如何改装商用溅射装置、以便对溅射膜的光学厚度进行实时监控。改装后的装置在靶面中心安置了一个小真空窗、使氦氖激光束能从中通过。利用所镀溅射层对光束反射率的影响、便可进行厚度的实时测量。
This article describes how to retrofit a commercial sputter unit to monitor the optical thickness of a sputtered film in real time. The modified unit houses a small vacuum window in the center of the target so helium-neon laser beams can pass through it. Using the sputtered layer on the beam reflectivity, real-time thickness measurements can be carried out.