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带电粒子瞬发核反应分析是最近十多年来发展起来的一种新的离子束分析技术,从1973年起至今已召开了5次国际会议,并发表了大量文章。 带电粒子瞬发核反应分析,是利用带电粒子束照射待测样品,使样品中待测元素发生核反应,然后测量伴随着核反应而瞬时放出的γ-射线或带电粒子,这样可以求得样品的组分、含量和深度剖面分布。它的优点是选择性强(干扰小)、灵敏度高、精确度高、非破坏性及快速。此外还可以对样品表面进行微束(约微米数量级)扫描它适于重基体中轻杂质的分析。带电粒子瞬发核反应分析的灵敏度一般为10~(14)～10~(15)at/cm~2,个别达到10~(12)at/cm~2。分析深度一般为几微米,个别达到几十微米。深度分辨率一般为0.01～0.1μm,有时达20A左右。
Charged particle transient nuclear reaction analysis is a new ion beam analysis technique developed in recent ten years. Since 1973, it has held 5 international conferences and has published a large number of articles. Charged particle transient nuclear reaction analysis is the use of charged particle beam irradiation of the sample to be tested, the sample elements in the nuclear reaction, and then measured along with the nuclear reaction and the instantaneous release of γ-rays or charged particles, which can be obtained by the sample components , Content and depth profile distribution. It has the advantages of strong selectivity (small interference), high sensitivity, high accuracy, non-destructive and fast. In addition, the sample surface can be micro-beam (about micron order) scanning it suitable for analysis of light impurities in the matrix. The sensitivity of charged particle transient nuclear reaction analysis is generally 10 ~ (14) ~ 10 ~ (15) at / cm ~ 2 and 10 ~ (12) at / cm ~ 2 respectively. The depth of the analysis is generally a few microns, up to several dozen microns individually. Depth resolution is generally 0.01 ~ 0.1μm, sometimes up to 20A.