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本文简要介绍了利用四极质谱定量分析技术对某离子管管内氢气分压强与氢发生器加热功率关系的测定结果,同时也给出了附在该离子管上的微型钛泵对管内残气成分影响的质谱分析结果。
This paper briefly introduced the determination of the relationship between the hydrogen partial pressure and the heating power of hydrogen generator in an ion tube by using the quadrupole mass spectrometry quantitative analysis technique. At the same time, Impact of mass spectrometry results.