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TiO_2-CeO_2 films were deposited on soda-lime glass substrates at varied substrate temperatures by rf magnetron sputtering using 40% molar TiO_2-60% molar CeO_2 ceramic target in Ar∶O_2=95∶5 atmosphere. The structure, surface composition, UV-visible spectra of the films were measured by scanning electron microscopy and X-ray diffraction,and X-ray photoelectron spectroscopy, respectively. The experimental results show that the films are amorphous, there are only Ti 4+ and Ce 4+ on the surface of the films, the obtained TiO_2-CeO_2 films show a good uniformity and high densification, and the films deposited on the glass can shield ultraviolet light without significant absorption of visible light, the films deposited on substrates at room temperature and 220 ℃ absorb UV effectively.
TiO_2-CeO_2 films were deposited on soda-lime glass substrates at varied substrate temperatures by rf magnetron sputtering using 40% TiO_2-60% molar CeO_2 ceramic target in Ar: O_2 = 95: 5 atmosphere. The structure, surface composition, UV- visible spectra of the films were measured by scanning electron microscopy and X-ray diffraction, and X-ray photoelectron spectroscopy, respectively. The experimental results show the films are amorphous, there are only Ti 4+ and Ce 4+ on the surface of the films, the obtained TiO 2-CeO 2 films show a good uniformity and high densification, and the films deposited on the glass can shield ultraviolet light without significant absorption of visible light, the films deposited on substrates at room temperature and 220 ° C absorb UV effectively.