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采用低氟溶胶-凝胶法在La Al O_3(100)基板上制备了YBa_2Cu_3O_(7-x)(YBCO)薄膜,研究了在725℃热处理过程中,氧含量对最终所得YBCO薄膜临界电流密度J c的影响。研究发现,热处理过程中氧气含量在100~1700μL/L范围变化时,所获得的YBCO薄膜均具有良好的双轴织构特征。然而,当氧气含量为100或200μL/L时,由于YBCO薄膜致密性差,不能获得高J c的YBCO薄膜。随着氧气含量的增大,YBCO薄膜表面逐渐变得致密。当氧气含量增加到300μL/L时,YBCO薄膜表面较致密,J c达到4.3 MA/cm~2。继续增大氧含量至800和1700μL/L,薄膜表面逐渐出现富铜第二相颗粒,成为其J c较低的主要原因。
YBCO films were prepared on a LaAl O 3 (100) substrate by a low-fluorine sol-gel method. The effects of oxygen content on the final current density J c impact. The results show that the YBCO films obtained have good biaxial texture when the oxygen content changes from 100 to 1700 μL / L during the heat treatment. However, when the oxygen content is 100 or 200 μL / L, a high J c YBCO film can not be obtained due to the poor compactness of the YBCO film. With the increase of oxygen content, the surface of YBCO film gradually becomes dense. When oxygen content increased to 300 μL / L, the surface of YBCO film was denser and J c reached 4.3 MA / cm ~ 2. Continue to increase the oxygen content to 800 and 1700μL / L, the film surface gradually rich in copper-rich second phase particles, as its J c lower main reason.