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目前制造计算机逻辑电路的业务范围主要因素是芯片数目不断地迅速增长,例如,每年设计和生产双极型芯片数目比五年前增加了100倍,这种喜剧性的增长反过来提出了一个严重的周期问题,它要求非常灵活的设计和制造系统。 为帮助满足对制造大规模逻辑集成电路的不断增加的自身要求,我们已经发展了快速周期(QTAT)的半导体单一晶片工艺生产线,该线是以(?)(?)元件为基础,是由计算机控制和高度自动化的。该线是由如图(1)所示的八个自动化段所组成,具有能够提供范围广泛的部件的特色:自动化工艺控制系统、晶片电子发送指令系统,数据收集和分析,送料过程控制和单一晶片工艺生产能力自动化,晶片管理和贮存系统,沾(?)控制系统和
The main factor in the current scope of the business of making computer logic is the ever-increasing number of chips. For example, the annual number of designs and production of bipolar chips has increased 100-fold from five years ago. This comic growth, in turn, raises a serious The cycle issues, which require very flexible design and manufacturing systems. To help meet the ever-increasing demands for manufacturing large scale logic integrated circuits, we have developed a QTAT semiconductor single-wafer process line that is based on (?) (?) Elements and is composed of a computer Controlled and highly automated. The line consists of eight automation segments as shown in Figure (1) with features that provide a wide range of components: automated process control systems, wafer electronic sending command systems, data collection and analysis, feeding process control, and single Chip Process Automation, Chip Management and Storage Systems, Dip (?) Control Systems and