,Effect of the Viscosity of Silicone Oil on the Aggregation Behavior of C:F Clusters on a Silicone O

• 作 者: DENG Yan-Hong YE Chao YUAN Yuan LIU Hui-Min CUI Jin
• 机 构: School of Physics Science and Technology, Key Laboratory of Thin Films, Soochow University, Suzhou 2
• 出 处: 中国物理快报（英文版）
• 发表日期: 2011年4期

We investigate the effect of silicone oil viscosity on the aggregation behavior of C:F clusters deposited on silicone oil liquid substrates with viscous coefficients of 100, 350 and 500mm2/s by C4Fs dual-frequency capacitively coupled plasma.The aggregated C:F chusters all exhibit a branch-like fractal structure.However, the fractal dimension decreases from 1.67 to 1.45 with the silicone oil viscous coefficient increasing from 100 mm2/s to 500mm2/s.Owing to the fractal dimension of 1.67 and 1.45, corresponding to the diffusion-limited-aggregation (DLA)model and the cluster-cluster-aggregation(CCA)model respectively, the results show that the increase of silicone oil viscosity can lead to the change of C:F clusters aggregating on a silicone oil liquid substrate from DLA to CCA growth.