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本文从理论上分析了衍射强度比偏差Δ（Ｉ／Ｉ∞）和衍射峰位偏差Δ２θ对Ｓｅｅｍａｎｎ－Ｂｏｈｌｉｎ准聚焦Ｘ射线衍射仪测量表面单层薄膜厚度误差的影响。分析结果表明，降低Δ（Ｉ／Ｉ∞）可提高膜厚的测量精度，在Δ（Ｉ／Ｉ∞）－定的情况下，按μρｔ［Ｓｉｎ（－１）γ＋Ｓｉｎ（－１）（２θ－γ）］＝１选择靶辐射和衍射晶面可使由Δ（Ｉ／Ｉ∞）导致的膜厚测量误差具有极小值；选择高角度衍射线有助于减小试样离焦引起的衍射峰位偏差，亦可降低因衍射角测量偏差导致的膜厚测量误差，当衍射线处于薄膜的法向２θ＝γ＋π／２时，角度项误差（Δｔ／ｔ）（２θ）完全消除。
In this paper, the influence of the diffraction intensity ratio deviation Δ (I / I∞) and the diffraction peak position deviation Δ2θ on the thickness error of the monolayer film of the Seemann-Bohlin quasi-focusing X-ray diffractometer was analyzed theoretically. The analysis results show that decreasing Δ (I / I∞) can improve the measurement accuracy of the film thickness. In the case of Δ (I / I∞), μρt [Sin (-1) γ + Sin (-1) γ)] = 1 The selection of the target radiation and the diffraction crystal plane can have a very small value for the measurement error of the film thickness caused by Δ (I / I∞); the selection of the high-angle diffraction line helps to reduce the diffraction caused by the sample defocus The deviation of the peak position can also reduce the measurement error of the film thickness caused by the measurement error of the diffraction angle. When the diffraction line is in the normal 2θ = γ + π / 2 of the film, the angular error (Δt / t) (2θ) is completely eliminated.