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铌三铝(Nb_3Al)和铌三神(Nb_3As)都是超导材料,过去常用冶金方法得到。如果能用离子注入这种新工艺形成Nb_3-Al和Nb_3As并能改善或提高其超导性能,将是一件很有意义的工作。离子注入后是否形成这类超导合金,需要对样品作实验分析。我们用背散射技术分析了铌膜(由真空蒸发铌于微晶玻璃或石英玻璃底衬上形成)上注入适量的铝或砷,并经过不同退火条件处理的一批Nb-Al和Nb-As样品,实验结果如下:
Niobium tri-aluminum (Nb_3Al) and niobium-trishenium (Nb_3As) are superconducting materials that have been commonly used metallurgically. If the ion implantation can be used to form Nb_3-Al and Nb_3As and improve or enhance their superconductivity, it will be a very meaningful task. The formation of such superconducting alloys after ion implantation requires experimental analysis of the samples. Using backscattering technique, we analyzed a series of Nb-Al and Nb-As films with niobium films (formed by vacuum evaporation of niobium on glass-ceramic or quartz glass substrates) with appropriate amounts of aluminum or arsenic and annealed under different annealing conditions Samples, the experimental results are as follows: