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利用ZYGO MarkⅢ-GPI干涉仪对120 mm×88 mm元件镀膜前后进行了面形测量,获得了峰谷值(PV)和均方根梯度(GRMS),并对镀膜前后的PV,GRMS值进行了比较,发现镀膜后PV,GRMS值分别有所增加,同时对两者进行了线性拟合,结果表明两者在一定程度上存在着线性关系,并从理论上进行了模拟论证。同时对个别样品进行了功率谱密度(PSD)分析,发现镀膜后PSD曲线较镀膜前有所升高,这与基片的抛光程度以及镀膜过程有着密切联系。
Before and after the 120 mm × 88 mm element coating was measured by ZYGO MarkⅢ-GPI interferometer, the peak-to-valley (PV) and root mean square gradient (GRMS) were obtained. The PV and GRMS values before and after coating The results show that the PV and GRMS values increase after coating respectively, and the linearity of the two values has been fitted. The results show that the two have a linear relationship to a certain degree, and the simulation is demonstrated theoretically. At the same time, the power spectrum density (PSD) analysis of individual samples was carried out. It was found that the PSD curve after coating increased compared with that before coating, which was closely related to the polishing degree of the substrate and the coating process.