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本文介绍了一种可以测量射频感应耦合等离子体密度的静电探针方法。并给出了它的测量原理，实验方法和实验结果。实验结果表明：所测等离子体密度反映了等离子体的特性，并且诊断手段简单、易行，为等离子体诊断提供了一种很好的实验手段。
This article describes an electrostatic probe method that can measure the RF-coupled plasma density. Its measuring principle, experiment method and experiment result are given. The experimental results show that the measured plasma density reflects the characteristics of the plasma, and the diagnostic method is simple and easy, which provides a good experimental method for plasma diagnosis.