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射频功率为50～500W（1．56MHz）、气压为1．3～13．3Pa的氩和四氟化碳放电气氛中，测量了阻抗、直流自编压和峰－峰电压。测量结果表明，这种放电可以采用电容与电阻的串、并联来描述。同时研究了离子轰击两个电极的能量比率，指出过去被广泛假设的离子轰击能量的比率与电极面积比的四次方关系并不相符。
Impedance, DC self-ballasted and peak-to-peak voltage were measured in RF and carbon tetrafluoride discharge atmospheres with RF power of 50-500 W (1.56 MHz) and an atmospheric pressure of 1.3-13.3 Pa. The measurement results show that this discharge can be described in terms of strings of capacitors and resistors in parallel. At the same time, the energy ratio of ion bombardment of two electrodes was studied. It was pointed out that the ratio of ion bombardment energy widely assumed in the past did not fit the quaternary relationship of electrode area ratio.