论文部分内容阅读
以聚苯乙烯(PS)微球为内核,通过控制正硅酸乙酯的水解过程制备具有不同壳层形态的核/壳结构PS/SiO2复合磨料,应用于二氧化硅介质层的化学机械抛光,借助AFM测量抛光表面的形貌、轮廓曲线及粗糙度.SEM和TEM结果显示:碱性水解条件下,复合磨料的壳层由SiO2纳米颗粒组成(非连续壳层);酸性条件下,复合磨料的壳层则呈无定型网状(连续壳层).抛光对比试验结果表明:复合磨料的PS弹性内核有利于降低表面粗糙度并减少机械损伤,SiO2壳层则有利于提高材料去除率,复合磨料的核/壳协同效应对于提高抛光质量具有主要影响.相对于非连续壳层复合磨料,具有连续壳层的PS/SiO2复合磨料能够得到更低的抛光表面粗糙度值(RMS=0.136 nm),且在抛光过程中表现出了更好的结构稳定性.然而,PS/SiO2复合磨料的壳层形态对抛光速率的影响则不明显.
PS / SiO2 composite abrasive with different shell morphology was prepared by controlling the hydrolysis of tetraethylorthosilicate (PS) microspheres. The chemical mechanical polishing , The morphology, contour curve and roughness of the polished surface were measured by means of AFM.The SEM and TEM results show that under the alkaline hydrolysis conditions, the shell of the composite abrasive consists of SiO2 nanoparticles (discontinuous shell); Under acidic conditions, Abrasive shell was amorphous network (continuous shell) .Poling contrast test results show that: PS elastic core composite abrasive is beneficial to reduce the surface roughness and reduce mechanical damage, SiO2 shell is conducive to improving the material removal rate, The core / shell synergetic effect of composite abrasive has the main effect on improving the quality of polishing.Compared with discontinuous shell composite abrasive, PS / SiO2 composite abrasive with continuous shell can get lower polished surface roughness (RMS = 0.136 nm ), And shows better structural stability during polishing.However, the influence of shell morphology of PS / SiO2 composite abrasive on polishing rate is not obvious.