【摘 要】
：
系统用自聚焦透镜代替共焦扫描显微镜中的聚焦透镜 ,将自聚焦透镜体积小的特点与共焦显微技术的轴向高分辨力和绝对位置跟踪特性有机结合 ,具有测头微小型化 ,高的轴向分辨力
【机 构】
：
哈尔滨工业大学超精密光电仪器工程研究所,哈尔滨工业大学超精密光电仪器工程研究所 黑龙江哈尔滨150001,黑龙江哈尔滨150001
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系统用自聚焦透镜代替共焦扫描显微镜中的聚焦透镜 ,将自聚焦透镜体积小的特点与共焦显微技术的轴向高分辨力和绝对位置跟踪特性有机结合 ,具有测头微小型化 ,高的轴向分辨力、较大倾斜表面的瞄准能力、对突跳位置的绝对跟踪能力等特点。选用PZT作为轴向扫描驱动元件 (线性范围± 5 μm ,每个脉冲 2nm进给 ) ,用高精度电容位移传感器作为位置跟踪元件 (线性范围± 5 μm ,分辨力 1nm)。对 2 0°角度块进行测试实验表明 ,在测头直径为 1mm的情况下 ,系统对 2 0°倾斜度以内的斜面轮廓的探测轴向分辨力可达 10nm。
The system uses a self-focusing lens instead of a focusing lens in a confocal scanning microscope to organically combine the characteristics of a small self-focusing lens with the axial high-resolution and absolute position tracking characteristics of a confocal microscope. The invention has the advantages of miniaturization of the probe head, high shaft To the resolution, the ability to aim a larger inclined surface, the absolute tracking of the sudden jump position and so on. PZT was selected as the axial scanning drive element (linear range ± 5 μm, 2 nm per pulse feed) and a high-accuracy capacitive displacement sensor was used as the position tracking element (linear range ± 5 μm, resolution 1 nm). Experiments on a 20 ° angle block show that the system can detect axial inclinations of up to 10 nm for bevel profiles within a 20 ° tilt at a probe diameter of 1 mm.
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