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介绍了使用硝酸盐气相沉积热解法制备Y-Ba-Cu-O系高温超导薄膜的工艺。使用这种方法制得的超导膜厚度约为25~70μm,零电阻温度T_(c(o))=79.37K。
The process of preparing Y-Ba-Cu-O high temperature superconducting thin films by the nitrate vapor deposition pyrolysis method is introduced. The thickness of the superconducting film obtained by this method is about 25 ~ 70μm, and the zero resistance temperature T_ (c (o)) = 79.37K.