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简要介绍水平排列硅光二极管色传感器的制作工艺．该器件波长在500nm到650nm范围内有一个单调的近于线性的光谱响应．入射光波长为600nm时，入射光强变化五个数量级，测出的波长基本不变．器件波长分辨率、最低入射光强、长时间测量的波长漂移以及波长温漂系数等特性的测量结果表明：该类色传感器已达高性能实用要求．
Briefly introduce the manufacturing technology of horizontal alignment silicon photodiode sensor. The device has a monotonic near-linear spectral response in the wavelength range of 500nm to 650nm. When the incident light wavelength is 600nm, the incident light intensity changes by five orders of magnitude, and the measured wavelength is basically unchanged. The measurement results of wavelength resolution, minimum incident light intensity, long wavelength drift and wavelength drift coefficient show that this type of color sensor has reached the high performance and practical requirements.