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用X 射线衍射、透射电镜、X射线光电子能谱、穆斯堡尔谱研究了直流磁控溅射法制备的Fe Zr B薄膜。用振动样品磁强计测量了薄膜的磁性能。X 射线衍射和透射电镜结果表明 ,制备态的薄膜是非晶的 ;X射线光电子能谱结果表明样品表面氧化较明显 ,深层部分Fe,Zr ,B结合占主导地位 ;穆斯堡尔谱结果表明薄膜中Fe原子周围Zr ,B原子的存在使Fe原子核内场值有所下降并导致超精细场分布P(H)出现双峰结构 ,薄膜中存在两种不同的局域微结构。
The films prepared by direct current magnetron sputtering were investigated by X-ray diffraction, transmission electron microscopy, X-ray photoelectron spectroscopy and Mossbauer spectroscopy. The magnetic properties of the films were measured with a vibrating sample magnetometer. X-ray diffraction and transmission electron microscopy showed that the as-prepared films were amorphous. The X-ray photoelectron spectroscopy results showed that the surface oxidation was more obvious and the combination of Fe, Zr and B in the deeper layers dominated. The Mossbauer spectroscopy results showed that the films The presence of Zr and B atoms around the Fe atom decreased the field value in the Fe nucleus and led to the bimodal structure of the hyperfine field distribution P (H). There are two different local microstructures in the film.