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We have prepared the Ho-substituted bismuth titanate (Bi3.4Ho0.6Ti3O12, BHT) thin films on Pt/Ti/SiO2/Si substrates using sol-gel method. The crystal structure and morphology of the films were characterized using X-ray diffraction and atomic force microscopy. The BHT film shows a single phase of Bi-layered Aurivillius structure and dense microstructure. The 2Pr and 2Ec of the 600-nm-thick BHT film were 38.4 μC/cm2 and 376.1 kV/cm, respectively at applied electric field 500 kV/cm. The dielectric constant and dielectric loss are about 310 and 0.015 at a frequency of 1 MHz, respectively. The Pr value decreased to 93% of its pre-fatigue values after 4.46×109 switching cycles at 1 MHz frenquency, and the BHT film shows good in-sulating behavior according to the test of leakage current.
We have prepared the Ho-substituted bismuth titanate (Bi3.4H0.6Ti3O12, BHT) thin films on Pt / Ti / SiO2 / Si substrates using sol-gel method. The crystal structure and morphology of the films were characterized using X-ray diffraction The BHT film shows a single phase of Bi-layered Aurivillius structure and dense microstructure. The 2Pr and 2Ec of the 600-nm-thick BHT films were 38.4 μC / cm2 and 376.1 kV / cm, respectively at applied electric field 500 kV / cm. The dielectric constant and dielectric loss are about 310 and 0.015 at a frequency of 1 MHz, respectively. The Pr value is reduced to 93% of its pre-fatigue values after 4.46 × 109 switching cycles at 1 MHz frenquency, and the BHT film shows good in-sulating behavior according to the test of leakage current.