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采用一种沟道内置沟道的套刻标记和自动工艺控制策略,双沟道图形化相关的CD均匀性问题可保持在具有量产价值的范围内。
Using an overlay mark of a channel’s built-in channel and an automatic process control strategy, the problem of CD uniformity associated with double-channel patterning can remain within mass-production value.