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无机柔性光电子技术由于具有柔性、便携、大面积等优点而受到科研人员的广泛关注,并取得了长足的进展.制备无机柔性光电子器件的技术关键是将传统刚性衬底上的纳米“构筑单元”(Building Blocks)以一种可控的、精确的、具有超高对准度的方式集成在柔性基底上.本文针对“转印”(Transfer Printing)技术中纳米“构筑单元”向柔性衬底集成时的可控转移及确定性组装(Deterministic Assembly)等难题,提出了边缘剪切转移技术,实现了柔性硅纳米带阵列在柔性基底上的制备及确定性组装.结合悬臂梁模型及有限元模拟,得出悬空硅纳米带内部在边缘剪切转移过程中所产生的应力与其厚度、宽度之间的函数关系.此外,本文还研究了不同方向硅条带在边缘剪切转移的过程中所制备硅纳米带的边缘形貌,并优化初始硅条带的方向,得到边缘平整的硅纳米带.最终,利用该技术制备出柔性衬底上的硅基光波导.
Inorganic flexible optoelectronic technology has drawn considerable attention due to its advantages such as flexibility, portability and large area, and has made considerable progress. The key technology for preparing inorganic flexible optoelectronic devices is to bond nano-structured units Building Blocks “are integrated on a flexible substrate in a controlled, accurate, ultra-high-alignment manner. In this paper, we focus on the” Transfer Printing “ ”Aiming at the problem of controllable transfer to flexible substrates and deterministic assembly, the edge-shear transfer technology is proposed to fabricate flexible silicon nanoribbon arrays on a flexible substrate with deterministic assembly. Beam model and finite element simulation, the relationship between the stress and the thickness and width in the process of edge-to-edge shear transfer in the inner part of the suspended silicon nanoribbons is obtained.Furthermore, The edge morphology of the prepared silicon nanoribbons during the transfer process is optimized and the direction of the initial silicon ribbons is optimized to obtain the edge-aligned silicon nanobelts. Finally, a soft Silicon-based optical waveguide on a substrate.