High Accuracy Zoom Magnification Measurement

• 作 者: 曾政东 孙长库 郑义忠 CHANG Sengkeong
• 机 构: School of Precision Instruments and Opto-Electronics Engineering, Tianjin University,Leica Instrumen
• 出 处: Transactions of Tianjin University
• 发表日期: 2010年04期
• 关键词: robustness correction camera pixel biomedical precise calibration projection sem

A precise zoom magnification is important for semiconductor industry and biomedical research. A novel measurement method is demonstrated for optical zoom magnification measurement in this paper. The magnification is obtained by pattern correction between barcode image formed by optical zoom and reference image generated by an ideal optical model. Measurement accuracy which is better than 0.06% has been achieved for optical zoom magnification. Compared with traditional concept, the measurement results are only dependent on two line edges. The barcode correlation method can achieve higher accuracy and better robustness by using the information over the whole field of view.

A precise zoom magnification is important for semiconductor industry and biomedical research. A novel measurement method is demonstrated for optical zoom magnification measurement in this paper. The magnification is obtained by pattern correction between barcode image formed by optical zoom and reference image generated by an ideal optical Compared with 0.06% has been achieved for optical zoom magnification. Compared with traditional concepts, the measurement results are only dependent on two line edges. The barcode correlation method can achieve higher accuracy and better robustness by using the information over the whole field of view.