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所述的光学轮廓仪是利用双焦透镜产生的偏振光束经被检面反射后形成了一共路干涉体系 ,因此该干涉体系可对超光滑表面做非接触无损检测而无需标准参考面 ;同时 ,利用双通道电子共模抑制技术可有效地抑制系统的各类噪声 ;计算机控制测量 ,即时给出表面粗糙度参数 ,测量结果与计量用 WYKO轮廓仪比对 ,结果吻合。仪器特别适合于均方根值 Rq为纳米及亚纳米量级的表面的测试 ,尤其是软质金属材料及膜层表面。其横向分辨率为 1μm,纵向分辨率为 0 .1 nm。
The optical profilometer uses the bifocal lens to generate a common-path interference system after the polarized beam is reflected by the inspection surface. Therefore, the interference system can make the non-contact non-destructive inspection on the ultra-smooth surface without the standard reference surface. Meanwhile, The use of dual-channel electronic common-mode suppression technology can effectively suppress the system of various types of noise; computer-controlled measurement, real-time surface roughness parameters are given, the measurement results and measurement with WYKO profiler comparison, the results match. The instrument is ideally suited for tests where the root mean square Rq is the surface of nanometer and sub-nanometer scale, especially the surface of soft metallic materials and coatings. Its horizontal resolution is 1μm and the vertical resolution is 0.1nm.