论文部分内容阅读
The resonance vibrations of acoustic sensors with two layers of (1120) textured hexagonal piezoelectric films are studied.When the acoustic and electric fields satisfy a special match condition,i.e.the phase variation of thickness shear mode (TSM) at each film equals π,both piezoelectric layers with opposite polarization directions reduce the first TSM and generate the second TSM with higher frequency and a higher quality factor.The excited second TSM can increase the product of the operating frequency and the quality factor,which is useful for improving the mass sensitivity and resolution of acoustic sensors.Additionally,both of the piezoelectric films have larger thickness and decrease the risk of mechanical damage in device production processes.Thin film bulk acoustic sensors have attracted great attention due to their small sizes,low power consumption and high sensitivity,etc.[1] The thickness shear mode (TSM) is more suitable for liquid sensing applications since much less acoustic energy is transferred into the liquid medium than that of longitudinal acoustic waves,due to the fact that ideal liquids cannot support propagations of shear waves.By using a TSM with a high resonance frequency,sensorsbased on thin film bulk acoustic resonator structures can be fabricated by the fixing of a sensitive coating on the surface of the device.[2] The binding events at the sensitive coating can cause a shift of the resonance frequency.[3]