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采用二维准平面电路模型研究了甚高频等离子体增强化学气相沉积(VHF-PECVD)大面积平行板电极间真空电势差分布.计算结果表明:随平行板电极尺寸增加和激发频率提高,电势驻波效应成为影响电极间电势差非均匀分布的重要因素.在尺寸为1.2m×0.8m的大面积平行板电极上应用40.68和60MHz两种激发频率,通过功率馈入点数量和位置优化,计算获得非均匀性分别为±2.5%和±5.5%的真空电势差分布.这些数值计算结果为大面积平行板电极在VHF-PECVD中应用提供了重要的理论指导.
The distribution of vacuum potential in large-area parallel plate electrodes by VHF-PECVD was studied by using two-dimensional quasi-planar circuit model. The calculated results show that with the increase of parallel plate electrode size and excitation frequency, The wave effect becomes an important factor that affects the non-uniform distribution of the potential difference between the electrodes.The 40.68 and 60MHz excitation frequencies are applied to a large area parallel plate electrode with a size of 1.2m × 0.8m, which is obtained through the optimization of the number and location of the power feeding points The distribution of vacuum potential difference is ± 2.5% and ± 5.5% respectively.These numerical results provide important theoretical guidance for the application of large area parallel plate electrode in VHF-PECVD.