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针对球面光学零件,采用气囊抛光方法对其进行加工,以正交实验为实验方法,以球面光学零件材料去除率和表面粗糙度为目标,研究了5个主要影响因素(气囊压缩量、气囊转速、内部压力、抛光液浓度和工件曲率半径)对材料去除率和表面粗糙度的影响程度,并根据实验结果优选工艺参数,找出影响材料去除率和表面粗糙度的工艺参数优化组合。以去除率和表面粗糙度为目标工艺参数,在优选后的结果指导下,根据优选后的工艺参数,以控制表面粗糙度为目标,采用离散进动方式抛光球面光学零件,可获得超精密的光滑表面。
For the spherical optical components, the airbag polishing method was used to process them. The orthogonal experiment was used as the experimental method. Five main influencing factors (airbag compression, airbag rotation speed , Internal pressure, concentration of polishing liquid and workpiece radius of curvature) on the material removal rate and surface roughness. According to the experimental results, the optimum process parameters were found out to optimize the process parameters affecting the material removal rate and surface roughness. Taking the removal rate and the surface roughness as the target process parameters, under the guidance of the optimized results, the spherical surface optical components are polished by discrete precession according to the optimized process parameters with the aim of controlling the surface roughness. Ultra-precision Smooth surface.