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本文从流体力学角度出发,分析了卧式PCVD系统平板舟极板间反应气体流速分布情况。讨论了不同几何尺寸平板舟对气体流和淀积膜均匀性的影响;指出造成卧式PCVD淀积膜不均匀的原因是极板间气体流速分布不合理;给出了卧式PCVD平板舟参数设计的经验公式和依据。按所给的经验公式设计的φ40m/m和φ50m/m平板舟,在φ75m/m管式炉中沉积的PCVD—SiN膜不均匀度≤±2.5%。膜用于二次钝化,满足工艺要求,钝化效果良好。
In this paper, from the perspective of fluid mechanics, the distribution of the reaction gas flow velocity between the plate and boat polar plates of a horizontal PCVD system is analyzed. The influence of plate boat with different geometry on gas flow and deposited film uniformity is discussed. The reason of non-uniform deposition of horizontal PCVD film is pointed out that the distribution of gas flow velocity between plates is not reasonable. The horizontal PCVD parameters Design experience and formula. The PCVD-SiN film deposited in a φ75m / m tube furnace with a thickness of φ40m / m and φ50m / m was designed according to the empirical formula given. The non-uniformity of the PCVD-SiN film was ≤ ± 2.5%. Membrane for the second passivation to meet the technical requirements, passivation effect is good.