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为了深入研究恒弹合金的飞秒激光烧蚀工艺,探索了飞秒激光在甘油介质中对恒弹性合金进行烧蚀的规律。因为激光烧蚀诱导产生的气泡在液体辅助烧蚀中扮演了一个重要角色,因此在实验中使用了粘度较大的甘油溶液,以研究气泡对于烧蚀规律的影响。在进行烧蚀时,采用不同的离焦量分别打点,以研究溶液介质对于激光聚焦点位置的影响。实验表明,在甘油溶液介质中对样品表面烧蚀时,孔深的变化比之在空气中烧蚀差别很大,在离焦量由正到负的过程中出现了两个孔深峰值,分别位于正负离焦量区间,并且在零离焦量附近达到极小值。而孔径的变化则基本呈现聚焦点位置越深入样品表面内部越大的趋势。根据对实验过程和结果的观察分析,这主要是由于气泡对激光烧蚀能力产生了很大的影响,从而导致了液体辅助烧蚀与在空气中烧蚀截然不同的结果。
In order to further study the femtosecond laser ablation process of invar alloy, the law of ablation of constant elastic alloy in glycerol medium by femtosecond laser was explored. Because bubbles induced by laser ablation play an important role in liquid-assisted ablation, a more viscous glycerol solution was used in experiments to investigate the effect of bubbles on ablation. During the ablation, different defocusing amounts were used to separate the dots in order to study the influence of the solution medium on the position of the laser focus. Experiments show that in the glycerin solution medium on the sample surface ablation, the hole depth changes much different from the ablation in the air, the amount of defocus from positive to negative two hole depth peak appeared, respectively In the positive and negative range of the amount of defocus, and in the vicinity of zero defocus amount reached a minimum. However, the change of aperture basically shows that the deeper the position of the focal point is, the larger the inside of the sample surface tends to be. Based on the observation and analysis of the experimental process and results, this is mainly due to the fact that the bubble greatly affects the laser ablation capability, resulting in a completely different result of liquid-assisted ablation and ablation in the air.