Design and fabrication of an embedded wire-grid nanograting

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An embedded wire-grid nanograting was designed and fabricated for using as a broadband polarizing beam splitter to reflect s-polarized light and transmit p-polarized light. A protected cladding layer of the same material as the grating’s was deposited on the ridge, whereas the wire-grid is deposited in the grating trenches, which makes it more firm during application. High polarization extinction ratios of above 40 and 20 dB for transmission and reflection, respectively, with a broad wavelength range for the whole optical communication bandwidth (850-1700 nm) and a wide angular tolerance (> ±20 ° ) are obtained by optimization of the designed structures, and the grating period is 200 nm. An embedded wire-grid nanograting was designed and fabricated for using as a broadband polarizing beam splitter to reflect s-polarized light and transmit p-polarized light. A protected cladding layer of the same material as the grating’s was deposited on the ridge, wire-grid is deposited in the grating trenches, which makes it more firm during application. High polarization extinction ratios of 40 and 20 dB for transmission and reflection, respectively, with a broad wavelength range for the whole optical communication bandwidth (850-1700 nm) and a wide angular tolerance (> ± 20 °) were obtained by optimization of the designed structures, and the grating period is 200 nm.
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