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多层膜一般是由交替沉积而成的两种元素组成的亚层构成,在近十几年中,由于多层膜具有独特的电、磁、光和机械等优良性能,并且合成的多层膜结构提供一个高密度界面条件以研究非平衡情况下在界面处材料的相互作用,所以使它在技术应用和基础研究领域的应用日趋广泛,在许多性能应用中人们必须考虑来自结构的影响,如果亚层的厚度都很小,在纳米数量级,在垂直多层膜的膜面方向上成一维周期结构,则这种一维周期结构将产生Bragg衍射,不过所产生的Bragg衍射峰在0°<2θ<10°范围内,一般称为调制峰,不管采用什么沉积技术,一般制备的多层膜不是非常完整的,有许多可能的非完整情况,界面粗糙度就是这种非完整情况之一,多层膜的结构主要由调制波长L(两层不同元素组成的亚层厚度之和)、亚层结构和表面粗糙度等因素来表达,目前人们对具有负混合能的多层膜系统已经进行了大量的研究工作,但对具有正混合能的多层膜系统则研究的较少.
Multi-layer film is generally composed of two sub-layers of alternately deposited sub-layers. Due to the unique electrical, magnetic, optical and mechanical properties of multi-layer films in the past ten years, Membrane structures provide a high-density interface condition to study the interaction of materials at interfaces at unbalanced conditions, so it has become more widely used in both technical applications and basic research, and in many performance applications one must consider the effects from the structure, If the thickness of the sub-layer is very small and forms a one-dimensional periodic structure in the film surface direction of the vertical multi-layer film on the order of nanometers, this one-dimensional periodic structure will produce Bragg diffraction but the resulting Bragg diffraction peak will be at 0 ° <2θ <10 °, commonly referred to as the modulation peak, the general preparation of the multi-layer film is not very complete, no matter what deposition technique is used, there are many possible non-integral case, the interface roughness is one of the non-complete cases , The structure of the multilayer film is mainly expressed by the modulation wavelength L (the sum of the thickness of the sub-layer composed of two layers of different elements), the sub-layer structure and the surface roughness. Currently, System has been a lot of research work, but few studies of the system is a multilayer film having a mixing energy.