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结合石墨烯场效应晶体管和机械谐振原理,研究了基于本地背栅石墨烯谐振沟道晶体管(RCT)的高频机械信号直接读取方法.利用机械剥离法获得的石墨烯,提出了一种基于刻蚀技术的器件制备方法,并实现了栅长和栅宽分别为1um的本地背栅RCT.实验结果表明,在室温下RCT的谐振频率范围为57.5-88.25 MHz.研究结果对加速石墨烯纳米机电系统和高频低噪声器件的应用有着重要作用.
Based on the principle of graphene field effect transistor and mechanical resonance, a high-frequency mechanical signal direct reading method based on local back gate graphene resonant channel transistor (RCT) is studied. Based on the graphene obtained by mechanical lift-off method, And the local back gate RCT with gate length and gate width of 1 μm respectively was obtained.The experimental results show that the resonant frequency range of RCT is 57.5-88.25 MHz at room temperature.The results of the study on the graphene nanorods Electromechanical systems and the application of high frequency and low noise devices play an important role.