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The contributing factors for the cavitation in piezoelectric pumps are analyzed,theoretically, and the device fitting for observing and recording is set up. With it the experiments are carried out to observe the emergence and the flowing of the cavitations in the piezoelectric pumps. According to the statistic and the analysis to the data of the experiments, the peculiar features are discovered. These features are composed of balls-amassing, center-more, and flow-out.