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在分析常规离子氮化法优缺点的基础上,本文提出了旁热式工频辉光放电离子氮化的设想,对其原理进行了理论分析和验证,简述了这项研究的初步成果。实验表明,在外加热源和压强为数 torr 的 NH_3稀薄气体条件下,工频交流辉光放电与常规法一样,可进行工件氮化;氮化速度与所加辉光电压及 NH_3压强关系不大,其数值在实用范围内不低于常规法。实验还表明,工频交流电可以在大面积工件上造成稳定的异常辉光放电。由此认为,此项设想在原理上是行得通的,有可能使离子氮化技术得到扬长避短。
Based on the analysis of the advantages and disadvantages of the conventional ion nitriding method, this paper presents the idea of ionization nitriding by side-heated glow discharge, and theoretically analyzes and verifies its principle. The preliminary results of this study are briefly described. Experiments show that under the condition of external heat source and NH3 thinner gas with several torr pressure, AC power glow discharge can be carried out on the same workpiece as the conventional method. The nitriding speed has little to do with the applied glow voltage and NH3 pressure, Its value in the practical range of not less than the conventional method. Experiments also show that the AC power can cause a stable abnormal glow discharge on a large area of the workpiece. Therefore, this idea is plausible in principle, it is possible to make ion nitriding technology to avoid weaknesses.