Structural and mechanical properties of nano-crystal TiN coatings

• 作 者: ZHANG Chenhui PAN Guoshun LUO
• 机 构: StateKeyLaboratoryofTribology
• 出 处: 中国科学：物理学、力学、天文学英文版
• 发表日期: 2004年z1期
• 关键词: TiN nano-crystal microstructure hardness GRAIN-BOUNDARY TRIPLE junctions. Ti
• 基金项目: This work was supported by the National Natural Science Foundation of China (Grant No.90206022) and the Fund for Outstanding Youth, China (Grant No. 50025515).

The structural and mechanical properties of TiN coatings prepared by ion beam assisted deposition (IBAD) were studied. The coatings have a polycrystal structure with grain size of ～10 nm or less. The hardness of the coatings increases with increasing grai