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本文讨论了可见光谱范围内双层黑铬选择性吸收涂层(Al+黑铬+Cr_2O_3)中的金属衬底膜、强吸收膜及减反射膜的光学常数谱n(λ)、κ(λ)及整个涂层的反射率谱R(λ)的测定与数据处理过程。 用椭圆偏振光谱仪测定金属膜(Al)、强吸收膜(黑铬)的样品椭圆参数谱△(λ)、ψ(λ);用“分层测试陪片测厚方案”测定各膜层的光学常数谱n_t(λ)、κ_t(λ),用双入射角法测定膜层厚度d。采用统计试验法进行数据处理,获得它们的n(λ)、κ(λ)谱值,最后计算出整个涂层的反射率谱值R(λ)。其值与用分光光度计实测的R(λ)值吻合。
In this paper, the optical constant spectra n (λ), κ (λ) of the metal substrate, the strong absorption film and the antireflection film in the double-layer black chrome selective absorption coatings (Al + black chromium + Cr 2 O 3) And the whole coating reflection spectrum R (λ) determination and data processing. The ellipsometric parameters △ (λ) and ψ (λ) of the sample of the metal film (Al) and the strong absorption film (black chrome) were measured with an ellipsometer. The optical Constant spectrum n_t (λ), κ_t (λ), using double angle of incidence method for the determination of film thickness d. Data processing is carried out by statistical test to obtain their n (λ), κ (λ) spectral values, and finally the reflectance spectrum value R (λ) of the whole coating is calculated. Its value coincides with the R (λ) value measured with a spectrophotometer.