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多晶硅大规模生产的工业化水平,主要体现在能稳定地、大批量地生产合乎预定质量指标的多晶硅。多晶硅质量的稳定又表现在要求达到的质量水平有好的延续性、重复性。工厂一般以合格率和一级品率为衡量指标。众所周知,合格率和一级品率都是以多晶硅的基磷、基硼及氧、碳含量、寿命值为衡量标准的。主要靠下列手段来达到这些参考要求:(1) 提高氯硅烷精馏产品的质量;(2) 提高高纯氢气的净化效果;(3) 控制稳定的适宜的多晶硅工艺生长条件;(4) 减小工艺过程的沾污。本文仅
The industrialization of large-scale production of polysilicon, mainly reflected in the stable, high-volume production of polysilicon in line with predetermined quality indicators. The stability of polysilicon quality is reflected in the quality level required to achieve good continuity and repeatability. Factories generally pass rate and a product rate as a measure. As we all know, pass rate and a product rate are based on polysilicon phosphorus, boron and oxygen, carbon content, life expectancy as a measure. These reference requirements are mainly achieved by: (1) improving the quality of the chlorosilane distillation product; (2) increasing the purification effect of the high purity hydrogen; (3) controlling the steady and suitable growth conditions of the polysilicon process; (4) reducing Small process contamination. This article only