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用Ｘ射线衍射线形的傅里叶分析及电阻法，研究了溅射Ｔｉ－４９．３７ａｔ％Ｎｉ合金薄膜的位错组态及相转变温度随退火条件的变化规律，以及位错密度与相变温度的关系。研究结果表明：随退火温度升高和保温时间增加，平均位错密度下降，马氏体相变温度升高。位错密度的变化受析出相粒子的大小和分布制约。随位错密度增加，马氏体相变温度下降，Ｒ相变温度基本保持不变。
The dislocation configuration and phase transformation temperature of sputtered Ti-49.37at% Ni alloy thin film were investigated by X-ray diffraction linear Fourier analysis and electrical resistance method. The variation of dislocation density and phase transition The relationship between temperature. The results show that with the increase of annealing temperature and holding time, the average dislocation density decreases and the martensitic transformation temperature increases. The variation of dislocation density is controlled by the size and distribution of phase particles. With the increase of dislocation density, the temperature of martensite transformation decreases and the temperature of R transformation remains almost unchanged.