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为向使用气浮系统的定位台提供性能更佳和精度更高的超静环境,对气浮系统动力学参数的调节问题进行了研究。研究结果表明:气膜厚度、磁预载力和气浮推力在气浮系统运行时相互影响,在静态调节过程中,选择合适的气膜厚度、气浮推力和磁预载力十分重要,需要综合考虑各种因素;在动态调节方法里,需要考虑不同工作阶段和使用情况下的动力学参数的匹配问题,其中磁预载力选择较大一些,有利于增大气浮系统的稳定性。
In order to provide a more stable and accurate ultra-quiet environment for the positioning stage using air-flotation system, the adjustment of dynamic parameters of air-flotation system was studied. The results show that the gas film thickness, the magnetic preload force and the flotation thrust influence each other during the operation of the flotation system. It is very important to select suitable film thickness, flotation thrust and magnetic preloading force during static adjustment. Consider various factors; in the dynamic adjustment method, it is necessary to consider the matching of kinetic parameters under different working stages and conditions of use, in which the selection of magnetic preloading force is larger, which is beneficial to increase the stability of the flotation system.