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英国牛津激光公司的 GP系列气体净化器可解决由准分子激光混合气体中杂质聚集造成的性能问题 ,它价格便宜 ,操作简单。在减弱杂质聚集方面它有最高规格的安全性和可靠性。GP系列可连续高效运转 ,保证准分子激光工具内的低温气体处理系统保持最佳运转性能。在 F2 或 HCl组分的混
GP series gas purifiers from Oxford Laser Co., Ltd. can solve the performance problem caused by the accumulation of impurities in the excimer laser mixed gas. It is cheap and easy to operate. It has the highest level of safety and reliability in reducing the buildup of impurities. The GP Series operates continuously and efficiently to ensure optimal operation of the cryogenic gas processing system within the excimer laser tool. Mix in F2 or HCl components