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《集成电路主要工艺设备名词术语》行业标准审定会议于今年9月9日—11日在西安召开。会议由机电部第四十五研究所高级工程师廉子丰同志主持。 出席这次会议的主要有我国半导体行业的骨干企业、科研单位及大专院校共17个单位24名代表。 经过认真审查和讨论,与会代表一致通过了“术语”标准的定稿和报批。会议认为: 集成电路设备名词术语标准的制定,是
“IC process equipment terminology” industry standard validation meeting on September 9 this year - 11 held in Xi’an. The meeting was presided over by Prof Lian Zi-feng, a senior engineer of the 45th Research Institute of the Electrical and Mechanical Department. Attended the meeting are mainly 24 major representatives of 17 units of backbone enterprises, research institutes and tertiary institutions in China’s semiconductor industry. After careful examination and discussion, delegates unanimously adopted the finalization and approval of the “terminology” standard. The meeting said: The standard terminology for integrated circuit equipment is formulated