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轻敲模式原子力显微镜高次谐波信号包含待测样品表面纳米力学特性等方面的信息,但是传统原子力显微镜的高次谐波信号非常微弱.里兹法证明在探针悬臂的特定位置打孔可以实现探针的内共振从而增强高次谐波信号强度.本文通过有限元仿真计算获得探针第一共振频、第二共振频及其比值随着孔的尺寸和位置变化的规律.在实验上通过聚焦离子束在探针悬臂上打孔使其第二共振频约为第一共振频的6倍,提高了第6次谐波信号的信噪比,并在实验室研制的高次谐波成像实验装置上获得了6次谐波图像.
Tapping mode The AFM harmonic signal contains information about the nanomechanical properties of the surface of the sample to be measured, but the high-order harmonics of traditional AFM signals are very weak.Ritz method proves that perforating in a specific position of the probe cantilever To achieve the probe’s internal resonance to enhance the higher harmonic signal intensity.This paper through the finite element simulation to obtain the probe first resonance frequency, the second resonance frequency and its ratio with the hole size and location changes in the law.In the experiment By focusing the ion beam on the probe cantilever, the second resonance frequency is about six times of the first resonance frequency, improving the signal-to-noise ratio of the sixth harmonic signal and improving the high harmonic wave The imaging device obtained the sixth harmonic image.