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硅上高精度薄膜电阻(ROS)不仅是一种新型的混合集成电路电阻元件,而且,由于其工艺能与双极型和CMOS工艺相兼容,因而也是单片集成电路中高精度电阻网络制作的理想技术.本文介绍了ROS工艺及其在12位硅栅CMOS D/A转换器中的应用.
High-precision silicon on-film (ROS) is not only a new type of hybrid integrated circuit resistor, but also ideal for high-precision resistor networks in monolithic integrated circuits due to its process compatibility with bipolar and CMOS processes Technology.This paper describes the ROS process and its application in a 12-bit Si gate CMOS D / A converter.